前驱体材料 Precursor material金属有机类英文名化学式CAS号别名中文名Trimethyl AluminumC3H9Al75-24-1TMA三甲基铝DiethylzincZn(C2H5)2557-20-0DEZ二乙基锌DimethylzincZn(CH3)3544-97-8DMZ二甲基锌TrimethylgalliumGa(CH3)31445-79-0TMG三甲基镓TriethylgalliumGa(C2H5)31115-99-7TEG三乙基镓TrimethylindiumC3H9In3385-78-2TMI三甲基铟Trimethylbismuth(CH3)3Bi593-91-9TMB三甲基铋Trimethyl antimonySb(CH3)3594-10-5TMSb三甲基锑Antimony triethySb(C2H5)3617-85-6TESb三乙基锑DiethylberylliumBe(C2H5)2542-63-2DEB二乙基鈹Di-t-butyltelluridePhTeMgBr83817-35-0DTBT二叔丁基碲Diethvl telluriumTe(C2H5)2627-54-3TETe二乙基碲DiisopropyltelluriumC6H14Te51112-72-2DipTe二异丙基碲Tris(dimethylamido)gallium(III)Ga(N(CH3)2)357731-40-5TDMAG三（二甲氨基）镓Tris(dimethylamido)antimony(III)C6H18N3Sb7289-92-1TDMASb三（二甲胺）锑Tetrakis(diethylamion)hafniumC8H24HfN419962-11-9TDMAH四（二甲胺）铪Ethanamine, N-methyl-,hafnium(4+) salt (4:1)C12H32HfN4352535-01-4TEMAH四（甲乙胺）铪N-methyl-N-[tris(dimethylamino)germyl]methanamineC8H24GaN47344-40-3TDMAGe四（二甲胺）锗Tetrakis(dimethylamino)zirconiumC8H24N4Zr19756-04-8TDMAZ四（二甲胺）锆Tetrakis(ethylmethylamino)zirconiumC12H32N4Zr175923-04-3TEMAZ四（甲乙胺）锆N-methyl-N-[tris(dimethylamino)stannyl]methanamineC8H24N4Sn1066-77-9TDMASn四（二甲胺）锡Tetrakis(dimethylamino)titaniumC8H24N4Ti3275-24-9TDMAT四（二甲胺）钛Ethyl(methyl)azanide,titanium(4+)C12H32N4Ti308103-54-0TEMAT四（甲乙胺）钛Tetrakis(ethylmethylamino)vanadiumC12H32N4V791114-66-4TEMAV四（甲乙胺）钒Tantalum(5+) ethanolateC10H30O5Ta6074-84-6PETOTa乙氧基钽Pentakis(dimethylamino)tantalum(V)C10H30N5Ta19824-59-0PDMATa五（二甲胺）钽FerroceneC10H10Fe102-54-5FeCp2二茂铁MagnesoceneC10H10Mg1284-72-6MgCp2二茂镁ManganoceneC10H10Mn73138-26-8MnCp2二茂锰NickeloceneC10H10Ni1271-28-9NiCp2二茂镍RuthenoceneC10H10Ru1287-13-4RuCp2二茂钌Cobaltocene(η5-C5H5)2Co1277-43-6CoCp2二茂钴bis(methylcyclopentadienyl)magnesiumC12H14Mg40672-08-0Mg(MeCp)2二甲基二茂镁Bis(ethylcyclopentadienyl)magnesiumC14H18Mg114460-02-5Mg(EtCp)2二乙基二茂镁1,1'-DiethylmanganoceneC14H18Mn101923-26-6Mn(EtCp)2二乙基二茂锰Bis(ethylcyclopentadienyl)rutheniumC7H9RuC7H932992-96-4Ru(EtCp)2二乙基二茂钌(Trimethyl)methylcyclopentadienylplatinum(IV)C9H16Pt94442-22-5(MeCp)Pt(CH3)3三甲基甲基环戊二烯基铂Lithium DipivaloylmethanateC11H19LiO222441-13-0Li(thd)（四甲基庚二酮）锂(2,2,6,6-Tetramethyl-3,5-heptanedionato)silverC11H19AgO279827-25-1Ag(thd)（四甲基庚二酮）银Copper(II) hexafluoroacetylacetonate hydrateCu(C5HF6O2)2155640-85-0 Cu(hfac)2二（六氟戊二酮）铜Palladium(II)hexafluoro-2,4-pentanedionateC10H8F18O4Pd64916-48-9Pd(hfac)2二（六氟乙酰丙酮）钯Iridium(III)2,4-pentanedionateC15H21IrO615635-87-7Ir(acac)3三（乙酰丙酮）铱Neodymium-thdC33H60NdO615492-47-4Nd(thd)3三（四甲基庚二酮）钕Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)ytterbium(III)C33H57O6Yb15492-52-1Yb(thd)3三（四甲基庚二酮）镱Tetrakis(tetramethylheptanedionato)ceriumC22H38CeO418960-54-8Ce(thd)4四（四甲基庚二酮）铈Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)lanthanum(III)C33H57LaO614319-13-2La（thd）3三（四甲基庚二酮）镧Tris(tetramethylcyclopentadienyl)lanthanumC27H39La148607-23-2La(MeCp)3甲基环戊二烯镧Bis(trimethylsilyl)azanide,lanthanum(3+)C18H54LaN3Si6175923-07-6La(TMSA)3三(二(三甲硅)胺)镧Lead(II)-2,2,6,6-tetramethyl-3,5-heptanedionateC22H38O4Pb21319-43-7Pb(thd)2二（四甲基庚二酮）铅Bismuth III TetramethylheptanedionateC33H57BiO6142617-53-6Bi(thd)3三（四甲基庚二酮）铋Erbium-DPMC33H57ErO634750-80-6Er(thd)3三（四甲基庚二酮）铒Tris(2,2,6,6-Tetramethyl-3,5-Heptanedionato)Yttrium(III)C33H57O6Y15632-39-0Y(thd)3三（四甲基庚二酮）钇Bis(N,N'-di-i-propylacetamidinato)cobalt(II)(C8H17N2)2Co635680-58-9Co(iPr-MeAMD)2二（N,N’-二异丙基乙脒基）钴Bis(N,N'-diisopropylacetamidinato) Nickel (II)(C8H17N2)2Ni635680-62-5Ni(iPr-MeAMD)2二（N,N’-二异丙基乙脒基）镍lanthanum tris(N,N'-diisopropylacetamidinate)(C8H17N2)3La635680-72-7La(iPr-MeAMD)3三（N,N’-二异丙基乙脒基）镧Yttrium tris(N,N'-diisopropylacetamidinate)(C8H17N2)3Y
Y(iPr-MeAMD)3三（N,N’-二异丙基乙脒基）钇Molybdenum hexacarbonylMo(CO)613939-06-5Mo(CO)6六羰基钼(Trimethyl)methylcyclopentadienylplatinum (IV)C9H16Pt94442-22-5Me3Pt(MeCp)三甲基甲基环戊二烯铂Tris(methylcyclopentadienyl)yttrium(III)C18H21Y329735-72-0Y(MeCp)3甲基环戊二烯钇Indium,(h5-2,4-cyclopentadien-1-yl)-C5H5In34822-89-4InCp环戊二烯基铟Tin(IV) chlorideCl4Sn7646-78-8Cl4Sn四氯化锡Titanium(IV) isopropoxideC12H28O4Ti546-68-9TIPT四异丙醇钛Niohium pentaethnxidcNb(OC2H5)53236-82-6PETONb乙氧基铌Lithium t-butoxideC4H9LiO1907-33-1TBOLi叔丁醇锂Iron t-butoxideC12H27FeO3620945-29-13TBOFe叔丁醇铁GALLIUM (III) ISOPROPOXIDEC9H21GaO34452-61-3TPGa三异丙氧基镓Titanium tetrachlorideTiCl47550-45-0TiCl4四氯化钛Carbon tetrachlorideCCl456-23-5CCl4四氯化碳Carbon tetrabromideCBr4558-13-4CBr4四溴化碳PentachloropyridineC5Cl5N2176-62-7PCP五氯吡啶boride compoundB compound
AMY-B-330硼化合物Germanium(Ⅳ) methoxideC4H12GeO4992-91-6
甲氧基锗
硅基化合物英文名化学式CAS号别名中文名Bis(t-butylamino)silane([NH(C4H9)]2SiH2)186598-40-3BTBAS双(叔丁基氨基)硅烷Tris(dimethylamino)silaneC6H19N3Si15112-89-73DMAS三（二甲氨基）硅烷N,N-DisilylsilanamineH9NSi313862-16-3TSA(N,N-二硅烷基-硅烷胺)Bis(diethylamino)silaneC8H22N2Si27804-64-4BDEAS(SAM24)双（二乙胺基）硅烷DiisopropylaminosilaneC6H17NSi908831-34-5DIPAS(LTO-520)二（异丙氨基）硅烷Tetraethyl OrthosilicateC8H22N2Si1978/10/4TEOS原硅酸乙酯HexachlorodisilaneSi2Cl613465-77-5HCDS六氯乙硅烷Bis(trimethylsilyl)azanide,gadolinium(3+)C18H54GdN3Si635789-03-8Gd(TMSA)3三(二(三甲硅)胺)钆